“Mid-infrared ellipsometry offers a powerful approach for non-destructive optical critical dimension (OCD) metrology in advanced semiconductor manufacturing. This technique supports in-line ...
Myungkoo Kang (left), S.K. Sundaram (center), and Mehdi Kabir. Alfred University is recipient of a National Science Foundation (NSF) grant of nearly $350,000, which will be used to acquire equipment ...
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